TECHNOLOGIST
at
IM FLASH
, SINGAPORE
2008/November
• Working in Diffusion ( Diffusion is an process where forming
layer on wafer)
Diffusion is a 5 loader process, In
this we are using an BOAT .Boat is an parts which is
Carrying the WAFER in to Furnace with a quantity of 143
.Diffusion is critical process
Where if an ABORT we
can scrap the entire WAFER in this Process.
• Run the WAFER
lot’s in the Furnace m/c to create a layer of different process
like Nitride, Poly, Teos, Oxidation and Hafnium.
• We have to
monitor any type Alarm’s in the M/C side and try to solve the
Problem.
• If we are not able to solve the problems need to
activate the vendor for support.
• Changing due dummies and
performing the necessary pm activity to solve the high pc or
thickness fails.
• Loading and Unloading of Monitor in OFF-
LINE and Measure PC and THICKNESS of the MONITOR in ON-LINE and
OFF-LINE
• Collecting data and taking corrective measures
such as Pump down, running cycle Purge
Idle Purge.
• To carry
out the pm activity in diffusion furnaces such as Boat change,
inner tube pull down, outer tube pull down, cold trap pm’s as
per pm schedule assigned in system.
• Solving the line issues
to get smooth running of diffusion furnaces.